Industrial Plasma Engineering: Volume 1: Principles

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CRC Press, Jan 1, 1995 - Science - 339 pages
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This book will provide the necessary theoretical background and a description of plasma-related devices and processes that are used industrially for physicists and engineers.
It is a self-contained introduction to the principles of plasma engineering with comprehensive references. This volume also includes the terminology, jargon and acronyms used in the field of industrial plasma engineering - indexed when they first appear in the text - along with their definitions and a discussion of their meaning. It is aimed at assisting the student in learning key terminology and concepts, and providing the in-service engineer or scientist with a technical glossary. An extensive index and appendices enhance the value of this book as a key reference source. These incorporate a list of the nomenclature used in mathematical expressions in the text, physical constants, and often-used plasma formulae. SI units are used throughout.
Intended for students from all engineering and physical science disciplines, and as a reference source by in-service engineers.
Coverage:
* basic information on plasma physics and the physical processes important in industrial plasmas
* sources of ion and electron beams and ionizing radiation used in industrial applications
* physics and technology of DC and RF electrical discharges.
 

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Contents

Introduction
1
Plasma Treatment of Surfaces
2
Ion Interactions with Solids
15
Plasma Deposition of Thin Films
16
Plasma Etching for Microelectronics 18 Materials Processing with Thermal Plasma 19 Plasma Chemistry
17
Electrical Breakdown Switchgear and Corona
20
Plasma Lighting Devices
21
Applications of Electrohydrodynamics
22
Electron Sources and Beams
159
Ion Sources and Beams
189
Ionizing Radiation Sources
223
Dark Electrical Discharges in Gases
237
Inductive RF Electrical Discharges in Gases
391
Capacitive RF Electrical Discharges in Gases
417
Microwave Electrical Discharges in Gases
464
Appendices
516

Research and Development Plasmas Appendices including Annotated Bibliography
23
Kinetic Theory of Gases
34
Motion of Charges in Electric and Magnetic Fields
54
Characteristics of Plasma
117
B Physical Constants
523
About the Author
537
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