Industrial Plasma Engineering: Volume 1: Principles
This book will provide the necessary theoretical background and a description of plasma-related devices and processes that are used industrially for physicists and engineers.
It is a self-contained introduction to the principles of plasma engineering with comprehensive references. This volume also includes the terminology, jargon and acronyms used in the field of industrial plasma engineering - indexed when they first appear in the text - along with their definitions and a discussion of their meaning. It is aimed at assisting the student in learning key terminology and concepts, and providing the in-service engineer or scientist with a technical glossary. An extensive index and appendices enhance the value of this book as a key reference source. These incorporate a list of the nomenclature used in mathematical expressions in the text, physical constants, and often-used plasma formulae. SI units are used throughout.
Intended for students from all engineering and physical science disciplines, and as a reference source by in-service engineers.
* basic information on plasma physics and the physical processes important in industrial plasmas
* sources of ion and electron beams and ionizing radiation used in industrial applications
* physics and technology of DC and RF electrical discharges.
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Plasma Treatment of Surfaces
Ion Interactions with Solids
Plasma Deposition of Thin Films
Plasma Etching for Microelectronics 18 Materials Processing with Thermal Plasma 19 Plasma Chemistry
Electrical Breakdown Switchgear and Corona
Plasma Lighting Devices
Applications of Electrohydrodynamics
Electron Sources and Beams
Ion Sources and Beams
Ionizing Radiation Sources
Dark Electrical Discharges in Gases
Inductive RF Electrical Discharges in Gases
Capacitive RF Electrical Discharges in Gases
Microwave Electrical Discharges in Gases
Research and Development Plasmas Appendices including Annotated Bibliography
Kinetic Theory of Gases
Motion of Charges in Electric and Magnetic Fields
Characteristics of Plasma
B Physical Constants
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accelerated anode approximately axial axis axisymmetric breakdown characteristic charged particles coaxial collision frequency configuration constant corona current density curve cyclotron cylindrical deflection diode distribution function drift velocity electric field electrical conductivity electromagnetic electron collision frequency electron kinetic temperature electron number density electron plasma frequency electronvolts electrostatic energy transfer frequency flux gas pressure gases geometry given by equation glow discharge gyrofrequency gyroradius heating high voltage hollow cathode industrial applications interaction ion beam ion source ionization ions and electrons low pressure magnetic field magnetic induction magnetic mirror magnetized plasma mean free path meter microwave negative glow neutral gas non-thermal normal glow discharge operating parallel plate parameter Penning discharge physics plasma frequency plasma processing plasma reactor plasma sources plasma torch positive column radiation radius regime region relativistic resonance RF plasma sheath shown in figure skin depth space-charge limited Substituting equation surface thermal arcs Torr unmagnetized vacuum wall yields